This unit discusses the state-of-the-art in MEMS. The topics include introduction to lithography; understanding the role of photoresists and polyimides in MEMS; the role of surface tension and gravity; assembly of out-of-plane three–dimensional MEMS structures; microlens design, fabrication and analysis; actuation methods including voltage and charge drive, comb and scratch drives, thermal actuation and piezoelectric actuation; microfluidics and associated pumping mechanisms; understanding of micromachining methods namely bulk micromachining, surface micromachining and LIGA; deposition, etch and release processes; thin film issues—stress and strain; and MEMS applications which are used as... -- Course Website
